Analogous to an air lock; a chamber used to transfer substrates into a process chamber, without exposing it directly to atmosphere. Often a vacuum load lock is employed, frequently with a further level of isolation afforded by a robot transfer chamber.
The International system of scientific units is having a shake-up; with four of the basic measurement units (the ampere, kilogram, kelvin and […]
Sputtering as a means of thin film deposition has been used for many years. From time-to-time new techniques, or variations in […]
An interesting review article has been published in Science & Technology A: Vacuum, Surfaces, and Films: Vol 35, No 5. Entitled ‘Tracing […]
Death Valley is one of the hottest and driest places in the world and is a desert valley in Eastern California. This […]
